Cu-Si Nanocomposites Based on Porous Silicon Matrix

Abstract

Cu-Si nanocomposites formed by an immersion displacement deposition of Cu into porous silicon (PS) matrix have been experimentally studied. SEM and AES were used to investigate the structure and elemental composition of Cu-Si samples. The top part of the Cu-PS samples is shown to demonstrate the following structure: large faceted Cu grains at the top, a porous fine-grained copper film underneath the large grains, and the copper pointed rods extended from the surface into the PS layer. The top part of the silicon skeleton of the PS layer is converted into the copper by the etching followed by Cu displacement deposition. The porosity of the porous layer and displacement deposition times are found to form Cu-Si nanocomposites of various structures and various Cu-Si contents because of various extent of the silicon skeleton transformation into copper.