Secondary Electron Detector with the Unipotential Lens Structure for Variable Pressure/Environmental SEM

Abstract

To extend capabilities of classic instruments toward the VP/E technique, authors designed the vacuum-detector system in the form of a simple attachment, which can be mounted to a classic SEM, without changes in its original structure. The main part of the system is the vacuum and detection head, combining the intermediate chamber and electron detectors of chosen kinds. Authors investigate the SE detector showing the unipotential lens structure to find optimum solution for a wide range of gas pressures from high vacuum to pressures exceeding 10 mbar.