Nano-Displacement Sensing and Estimation (nDSE): Enabling Technology for Nano Metrology and Fabrication-Reference-Cited by-同舟云学术

Nano-Displacement Sensing and Estimation (nDSE): Enabling Technology for Nano Metrology and Fabrication

Published:2007-03 Issue: Volume:121-123 Page:817-822
ISSN:1662-9779
Container-title:Solid State Phenomena
language:
Short-container-title:SSP

Author:

Gao Jun¹,Picciotto Carl¹

Affiliation:

1. Hewlett Packard Company

Abstract

In this paper, we will present theory for nDSE (nano-scale Displacement Sensing and Estimation) and its application framework: IDMA (Indirect Displacement-Measurement-based Alignment). nDSE presents a clear and novel theoretical explanation to displacement sensing and estimation, especially down to the nano scale, a precision traditionally thought difficult or impossible to achieve because the displacements are below the wavelength of light and smaller than the pixel dimensions of practical observation systems. IDMA is an enabling framework based on nDSE to provide a new, low-cost, high precision overlay alignment for the challenging issue of nano scale alignment and metrology.

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics

Link

https://www.scientific.net/SSP.121-123.817.pdf

Reference5 articles.

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5. C. Picciotto, J. Gao: Displacement Estimation System and Method, US Patent Application, Docket #200403527 (Pending), August (2004).