A Linear Stepping Piezoelectric Motor Using Inertial Impact Driving

Abstract

With the rapid development of modern precision manufacturing industry,actuators with high resolution and long stroke are needed in many application fields. Linear piezoelectric motors adopting inertial impact driving mechanism has been driving the interests of many researchers for simple structure and compact size. To increase the efficiency of this type of stepping linear motor, a motor using two piezoelectric stacks was proposed in this work. Two piezoelectric stacks were placed in vertical and were pre-tightened by an elastic thin plate. Support for the stator was designed. Operation principle of this motor was analyzed. To validate this operation principle, a prototype was fabricated and testing on this prototype was conduct too. By applying saw wave voltage signal to piezoelectric stacked in this prototype, the stator of the motor is able to push its mover move with pace length of 2 micrometer.