A Micro Pressure Sensor Based on SU-8 Polymer

Abstract

This paper investigated an novel wireless RF pressure sensor fabricated with SU-8 polymer. The sensor consists of an inductor (L) interconnected with pressure-variable capacitor (C) to form a LC resonant circuit. The fabricated devices is 4 × 3 mm2 in size and houses 9 turns of Cu electro-plated coil with inductance of 100 nH. In this system, RF signal was transmitted from external antenna to the fabricated LC resonator. Then RF signal was changed as power of fabricated device via inductive coupling. The external antenna was modulated by resonant frequency of the LC resonator. By detecting this abrupt resonant frequency shift of the device, the pressure change of the device can be measured by wireless method.