Manufacturing Error in the Application of Improving Spectrum for a Vertical Coupling Microring Resonator

Abstract

All the effects of manufacturing errors on transmission spectrum are analyzed for a vertical coupling microring resonator (MRR). Results show that the core refractive index, core thickness and radius errors of ring result in central wavelength shift of the transmission spectrum, and the central deviation and thickness between the ring and channel lead to nonresonant light intensity change. In order to obtain satisfactory spectrum for a fabricated MRR device, some allowed manufacturing errors are discussed, and the accumulation and compensation of manufacturing errors are investigated.