Force Sensitive Property of Same-Base Quartz Crystal Resonator and Signal Amalgamation

Abstract

According to the stress distribution in the thin round-shaped quartz plate with radial force, multiple resonators are designed in the different positions on same quartz crystal wafer. The force sensitive property of the resonators in different positions is studied. The research result shows, the force sensitive property of the resonator is closely related to the locations and the adding force azimuth; the force sensitive property of the resonators in different positions have a significant difference. If making difference frequency process of the resonant frequencies which is produced by the resonators, the interfering factors of the temperature etc. can be inhibited; if making superposition and integration process of the resonators’ force sensitive property, the total force sensitive property of the resonator with the multiple-electrode structure can be improved.