Application of HPLC for the Analysis of Organic Additives in Cleaning Chemicals and Cleaning Mixtures-Reference-Cited by-同舟云学术

Application of HPLC for the Analysis of Organic Additives in Cleaning Chemicals and Cleaning Mixtures

Published:2005-04 Issue: Volume:103-104 Page:221-226
ISSN:1662-9779
Container-title:Solid State Phenomena
language:
Short-container-title:SSP

Author:

Metzger S.¹,Kolbesen Bernd O.¹

Affiliation:

1. Johann Wolfgang Goethe-University

Abstract

The suitability of high performance liquid chromatography (HPLC) for the direct determination of the concentration of complexing agents for single chemistry cleaning is demonstrated. HPLC, coupled to a mass spectrometric detector (HPLC-MS) and two-dimensional mass spectrometry (MS/MS) have been applied for the investigation of the reactions involved in the decomposition of the complexing agents. The techniques described are useful for determining the stability of organic additives in wet chemical cleaning baths.

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics

Link

https://www.scientific.net/SSP.103-104.221.pdf

Reference9 articles.

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