Line Scale Calibration in Non-Ideal Measurement Situation

Abstract

The precision line scale calibration in dynamical mode of operation is considered. A new interferometer-controlled comparator with moving microscope has been developed and optimised in order to reduce both the measurement uncertainty and calibration process duration. Modal analysis performed and measurements conducted of the spatial vibrations of comparator structure revealed that dynamically-induced errors can noticeably contribute to the measurement uncertainty budget. They can be prominently reduced, in particular, by proper improvement and optimisation of the carriage structure and elimination of the dry friction in the carriage drive.