Affiliation:
1. Korea Institute of Science and Technology
2. Korea University
Abstract
Effects of substrate temperature and phosphor doping on electrochemical characteristics of
the silicon film anode were investigated. The silicon thin films were synthesized directly on copper
foil by radio-frequency capacitively coupled plasma-enhanced chemical-vapor deposition (r.f.-CVD).
The cyclability of the silicon anode greatly depends on the surface morphology and surface resistivity.
The silicon film anodes which have granular structure and high conductivity showed higher cyclabilty
than those of planer and low conductivity, respectively.
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Cited by
15 articles.
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