Mechanical and Adhesive Properties of Plasma CVD Coatings on Various Substrates Using Scratch Test

Abstract

In this paper, the adhesive properties of hard coatings(TiN, TiCN) made by plasma chemical vapor depositions on non-nitrided and nitrided substrates was estimated using the scratch test, where adhesion was measured by the critical load (Lc). This value was determined as the normal force affecting the indenter and causing the coating detachment as well as the acoustic emission signal containing the information on the extent of coating damage. Results of the test showed that harder substrates and coatings give higher values of critical loads.