The 3D Imaging and Metrology of CMSX-4 Superalloy Microstructure Using FIB-SEM Tomography Method

Abstract

STEM-EDX and FIB-SEM tomography studies have been carried out to visualize three-dimensional morphology of the γ’ precipitates in different zones of ex-service turbine blade made of CMSX-4 single crystal superalloy. The results allowed the three dimensional analysis of the changes in microstructure of blade as resulting of operating conditions. Tomographic reconstructions provided quantitative data about γ and γ’ phase shape, size and volume fraction. It was shown that FIB-SEM tomography technique is suitable for 3D reconstruction of the objects of 100 nm in size or even smaller and thus enables the accurate quantitative microstructural analysis of this superalloy.