Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Cited by
25 articles.
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1. Wet Cleaning Equipment;Handbook of Integrated Circuit Industry;2023-11-28
2. Mask Manufacturing Equipment;Handbook of Integrated Circuit Industry;2023-11-28
3. Efficient purification of surface modified nanoparticles from its nanosuspension by using supercritical CO2 technology;The Journal of Supercritical Fluids;2023-08
4. Cu Wiring Fabrication by Supercritical Fluid Deposition for MEMS Devices;Novel Metal Electrodeposition and the Recent Application;2019-03-06
5. Applications of Supercritical Carbon Dioxide for Removal of Surface Contaminants;Developments in Surface Contamination and Cleaning: Applications of Cleaning Techniques;2019