Abstract
In this paper, a case of molybdenum contamination from wet cleaning is discussed, and various techniques are compared for their ability to detect molybdenum. In addition, the impact of this sort of contamination on the electrical results of a bipolar device is studied.
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Cited by
13 articles.
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