Affiliation:
1. Chinese Academy of Sciences
Abstract
This paper presents the design and simulation of a piezoresistive pressure sensor with wide operation range (up to the pressure of 1000 m-deep water). Structural and electrical simulations were carried out using COMSOL Multiphysics 4.3. The dimension of the membrane, and the geometry and placement of piezoresistors, were optimized through structural simulations. Electrical simulations were used to evaluate the performance of selected sensors. The output characteristics revealed good linearity throughout the measurement range with sensitivities of 0.4500~0.8964 mV/V/MPa. The optimum design of sensor was determined according to the simulation results.
Publisher
Trans Tech Publications, Ltd.
Reference12 articles.
1. Information on http: /www. neptunecanada. ca.
2. S. Aravamudhan and S. Bhansali: Sensors and Actuators A: Physical, vol. 142 (2008) No. 1, p.111.
3. S. Aravamudhan, S. Bhat, B. Bethala, et al.: OCEANS, 2005. Proceedings of MTS/IEEE (2005), vol. 2, p.1785.
4. A. Hyldgård, K. Birkelund, J. Janting, et al.: Sensors and Actuators A: Physical, vol. 142 (2008) No. 1, p.398.
5. A. Hyldgård, O. Hansen and E. V. Thomsen: Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on (2005), p.303.
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献