Multi-Function Fusion Measurement Method for Surface Texture

Abstract

The texture and characteristics of surface have been becoming the leading factors to achieve the designed function of products successfully. So the measurement of surface texture is more and more important. A kind of new multi-function fusion measurement method for surface texture is presented in the paper. Four kinds of different scale measurement methods such as microscopy image measurement, vertical scanning white light interference measurement, white light interference nanoprobe measurement and white light interference diamond-probe measurement are fused for the surface texture multi-function fusion measurement in this method.