Modification of Colloidal Silica with Sodium Aluminate

Author:

Gu Shuang Na1,Shi Ying1,Wang Liang Yong2,Liu Wei Li2,Song Zhi Tang2

Affiliation:

1. Shanghai University

2. CAS, Shanghai Institute of Microsystem and Information Technology

Abstract

Colloidal silica modified by sodium aluminate was examined. The particle size of Al-modified colloidal silica was slightly increased with increase of the sodium aluminate concentration, but colloidal silica may aggregate or gel under high concentration. Zeta potential was more negative and thermal stability was significantly improved through modification. The Al-modified colloidal silica was highly stable at pH 3-6.

Publisher

Trans Tech Publications, Ltd.

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Slurry components in metal chemical mechanical planarization (CMP) process: A review;International Journal of Precision Engineering and Manufacturing;2016-12

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