Study of MEMS Based Micropyrotechnic Igniter

Abstract

Micro-electro-mechanical system (MEMS) have recently seen their field of application extended to military. This is mainly due to the fact that MEMS technologies present a great to reduce the mass, cost, power consumption, while improving the reliability, performance and smartness. Application of MEMS technology, the micropyrotechnic igniter are produced.The principle is based on the integration of lead styphnate (LTNR) material within a micropyrotechnic igniter, which is produced by MEMS with 3 by 3 micro-igniter. Each igniter contains three parts (the igniter chip, silicon chamber, lead styphnate). One import point is the optimization of the igniter process obtaining Ni-Cr bridges with about 13Ω, which is triggered by electrical power delivered to LTNR. The resistance of Ni-Cr bridges is used to sense the temperature on the LTNR which is in contact. The other one point is the optimization of silicon chamber process obtaining incorporate configuration of micropyrotechnic igniter. The ignition performance of micropyrotechnic igniter array are tested with ignition voltage less than 13V. The experimental results will deeply contribute to the micropyrotechnic system. This paper will discuss all these point.