Aluminium Surface Grain Size Analysis on RIE Treatment-Reference-Cited by-同舟云学术

Aluminium Surface Grain Size Analysis on RIE Treatment

Published:2013-09 Issue: Volume:404 Page:67-71
ISSN:1662-7482
Container-title:Applied Mechanics and Materials
language:
Short-container-title:AMM

Author:

Sauli Zaliman¹,Retnasamy Vithyacharan¹,Fuad Fairul Afzal Ahmad¹,Ehkan Phaklen¹,Palianysamy Moganraj¹,Yeow Aaron Koay Terr¹

Affiliation:

1. Universiti Malaysia Perlis (UniMAP)

Abstract

Reactive Ion Etch (RIE) has been an important process in the world of microelectronic fabrication. Focus of this preliminary study is on how RIE affects the grain size of aluminum film which is fabricated on substrates. RIE parameters are varied to obtain 16 different recipes which are done using Design of Experiment. Grain size of the samples is recorded for all 16 samples before and after RIE treatment. This produces results that can be compared to obtain the effect of RIE on the aluminum film. Results show that RIE affects the mean grain size of the aluminum film as it increases after RIE treatment.

Publisher

Trans Tech Publications, Ltd.

Link

https://www.scientific.net/AMM.404.67.pdf

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