Low Reflectivity ErAlO Film on Si as Anti-Reflecting Coating in Solar Cells

Abstract

Amorphous Al2O3 and Er2O3 alloyed films were deposited on Si(001) substrates by radio frequency magnetron sputtering technique. Ellipsometry measurements show that the weighted average reflectivity in the wavelength between 400 and 1000 nm for the ErAlO is 2.25%. Emission spectra exhibit a strong emission band around 410 nm and a series of emission band near 970 and 1019 nm. All the results indicate that ErAlO could be a promising material for Si solar cells.