Analysis 2.5-D Permutation Power Transmission Line to Decrease Electro-Magnetic Influence at High Technology Nano-Fab-Reference-Cited by-同舟云学术

Analysis 2.5-D Permutation Power Transmission Line to Decrease Electro-Magnetic Influence at High Technology Nano-Fab

Published:2011-10 Issue: Volume:356-360 Page:2711-2717
ISSN:1662-8985
Container-title:Advanced Materials Research
language:
Short-container-title:AMR

Author:

Song Yu Lin¹,Yu Chwen²,Chuang Feng Chang¹,Tseng Ying Cheng³,Zou Jyun Yu³,Shsu Sen Gui¹,Ma Tzyh Ghuang³,Wu Tzong Lin¹,Chang Luh Maan¹

Affiliation:

1. National Taiwan University

2. Taiwan Semiconductor Manufacturing Company, Ltd

3. National Taiwan University of Science and Technology

Abstract

We present optimal permutation with 2.5-D power transmission lines system to reduce electro-magnetic influence at high technology nano-Fab. In this study, the magnetic field was lessened by mirror array power cable system, and simulation of results predicted the best permutations to decrease electromagnetic influence (EMI) value below 0.28 mG at working space without any shielding. Furthermore, this innovative method will cost down at high technology nano-Fab especially for 28 nanometer process.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

Link

https://www.scientific.net/AMR.356-360.2711.pdf

Reference8 articles.

1. R. M. F. Thornley and J. D. Hutchinson, Magnetic field measurement in the scanning electron microscope, Appl. Phys. Lett., Vol. 13, no. 8, p.249–250, Oct. (1968).

2. Yield Enhancement, International Technology Roadmap for Semiconductor (ITRS), 2007 edition.

3. Factory Integration, International Technology Roadmap for Semiconductor (ITRS), 2009 edition.

4. Cruz, P.; Izquierdo, C.; Burgos, M.; Optimum passive shields for mitigation of power lines magnetic field, IEEE Trans. Magn. Vol. 18, Issue 4, Oct, p.1357 – 1362, (2003).

5. M. Roccella , F. Lucca , R. Roccella , A. Pizzuto , G. Ramogida,A. Portone , A. Tanga, A. Formisano , R. Martone, Analysis of active and passive magnetic field reduction systems (MFRS) of the ITERNBI, Fusion Engineering and Design 82 p. p.709–715, (2007).