Research on MEMS Phthalocyanine-Based Gas Sensor-Reference-Cited by-同舟云学术

Research on MEMS Phthalocyanine-Based Gas Sensor

Published:2011-11 Issue: Volume:383-390 Page:6856-6860
ISSN:1662-8985
Container-title:Advanced Materials Research
language:
Short-container-title:AMR

Author:

Liu Xin¹

Affiliation:

1. Heilongjiang University of Science and Technology

Abstract

A gas sensor based on MEMS (microelectro-machine system) has been developed to provide a sensitive means of detecting nitrogen dioxide. The structure, configuration and fabrication steps were described. The sensor was copper phthalocyanine (CuPc) films which caused a resistance change upon exposure to nitrogen dioxide. The sensor demonstrated a good response and recovery time about 4s and 7s separately. Results also indicate to be accordance with the sensitive mechanism of CuPc in terms of semiconductor theory.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

Link

https://www.scientific.net/AMR.383-390.6856.pdf

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