Effect of Gas Pressure on Optical Properties of Nanocrystalline Diamond Films Deposited on SiC Substrates

Abstract

With use of electron-assisted chemical vapor deposition technology, nanocrystalline diamond films were deposited on SiC ceramics substrates at various gas pressure ( 0.5 ~ 2 kPa ). Effect of the gas pressure on optical properties of the nanocrystalline diamond films was studied. Raman scattering spectra were measured. Photoluminescence spectra were investigated in the range of 420 ~ 680 nm. Spectroscopic ellipsometry were analyzed from the near IR to the UV region ( 1.5 ~ 5.0 eV ). Results show that, when the gas pressure increased from 0.5 to 2 kPa, Raman scattering intensity of diamond increase and D/G ratio decrease; when the gas pressure was 0.5kPa and 2kPa, there is not any PL peak, however, there is a stronger PL peak at 485 nm when the gas pressure was 1kPa; extinctive coefficient k for the nanocrystalline diamond films deposited at 1kPa increase obviously with increase of photo energy.