Abstract
This paper presents an electromechanical coupled analysis for a single proof-mass one-axis capacitive accelerometer to supply a reference of design specification for subsequent readout circuit. Considering electrostatic force effect, the displacement of proof mass based on dynamic principle is calculated. Then the output of differential capacitive interface is simulated. It indicates that this accelerometer has a sensitivity of 2.09mV/G and capacitance change of 0.31fF.
Publisher
Trans Tech Publications, Ltd.
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