Piezoresistive and Mechanics Properties of Nanopolycrystalline Silicon Film Materials-Reference-Cited by-同舟云学术

Piezoresistive and Mechanics Properties of Nanopolycrystalline Silicon Film Materials

Published:2013-08-30 Issue: Volume:380-384 Page:4237-4240
ISSN:1662-7482
Container-title:Applied Mechanics and Materials
language:
Short-container-title:AMM

Author:

Lu Xue Bin¹,Cui Lin Hai¹,Huang Hai¹

Affiliation:

1. Harbin University of Science and Technology

Abstract

The polycrystalline silicon films with same doping concentration and different thickness were prepared by low pressure chemical vapor deposition. The gauge factors of the films samples were tested, the results show that the piezoresistive properties of nanopolycrystalline silicon film (NPSF) exceed that of common polycrystalline silicon film (CPSF). To apply the NPSF to MEMS piezoresistive device effectively, the Youngs modulus of the NPSF were tested by in-situ nanomechanical test system, the results show that the Youngs modulus of the NPSF is about between 155GPa and 158GPa. It is very useful to investigate the piezoresistive and mechanics properties of NPSF, the results show that NPSF is a suitable material in MEMS piezoresistive device.

Publisher

Trans Tech Publications, Ltd.

Link

https://www.scientific.net/AMM.380-384.4237.pdf

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