Element Characterization of AlZnO by Laser Induced Breakdown Spectroscopy (LIBS)

Abstract

We calculate the temperature of excited plasma, found that will be enhanced with pulse energy increased. The delay time and the pulse energy were very important to the LIBS signal and define the -0.5μs was very suitable to this experiment, determined the intensity of emission spectra was linear to the pulse energy when the delay time was fixed. By change the delay time, got the emission of bivalence ionization of Zn was just less than 500ns.At last, we had researched the effect of element concentration and the thickness of film on signal intensity. When the concentration of Al being increased from 2.5% to 5%, the intensity of signal enhanced double. At the same time the content of Zn being decreased from 78% to 76%, the intensity of signal had just no change.