Minimization of Total Processing Time in Semiconductor Photolithography Process

Abstract

This paper focuses on a scheduling problem in photolithography process of semiconductor manufacturing. The photolithography equipment can be divided into three main parts, that is, scanner, spinner, and developer. Generally, in like manner to the other processes, the identical product types are processed at the same time in photolithography process since a certain amount of recipe change time is required whenever product type is changed. So, in this research, we consider multi-product production case with different processing times and flow recipes, and then attempt to reduce total processing time in photolithography process. From this research, we show that the total processing time can be minimized if we give a variety of input orders of lots and wafers.