Investigation on Silicon V-Grooves Measurement with Spectral Domain Optical Coherence Tomography (SDOCT)

Abstract

The objective of this research was to investigate a new detection method for testing a MEMS V-shaped groove in silicon using spectral domain optical coherence tomography (SDOCT) technique with a thermal light source where the V-groove depth, width and bottom width were measured. The SD-OCT technique with non-contact operation and acquisition rate advantage made it suitable for on-line precision measurement of V-shaped grooves in silicon.