Affiliation:
1. Nanjing University of Aeronautics and Astronautics
Abstract
This paper presents a new method for micro-aperture measurement based on luminous flux. The principle and the structure of micro-aperture measurement system are introduced in detail. Compared with previous measurement methods, the proposed method has several advantages: The measuring head with array line structure can measure several apertures’ area directly at the same time. The shape of the aperture is not limited to a circle or any other shape. It is a measuring technique with high precision and low cost. The test results show that the uncertainty is mm of a circular 0.5 mm diameter aperture, and the average linearity value is 3.47% to the aperture which diameter in the range from 150 to 500um.
Publisher
Trans Tech Publications, Ltd.