MRR Prediction in Micro Channel Grooving Process by Ultra-Fast Pulse Laser

Abstract

Ultra-fast pulse laser is a popular tool in the Micro/nano channel fabrication. The final machining result is affected by numerous factors. To fulfill the design requirement and obtain a satisfactory machining quality and accuracy, screening the suitable parameter combination before experiment can save time and cost. This paper uses an integrated model of five prominent engineer parameters in a grooving process to plan the machining process. Additionally, some parameters in the model are adjustable during the machining process, the machining efficiency and fine finish are balanced due to prediction the evolution of the grooving.