Research on Compensation Method of Coupled Error in High-Precision Micro-Machining Process

Author:

Deng Yong Jun1,Jin Xin1,Zhang Zhi Jing1,Zhang Xiao Feng1,Ye Xin1,Ye Zhi Peng1

Affiliation:

1. Beijing Institute of Technology

Abstract

In this paper, a compensation method of coupling error used in high-precision turning machine is proposed. The laser interferometer and optical lens are used for measuring coupling error of machine; the precise motion characteristic of the micro-adjusting mechanism is utilized for compensating. In the end, this method is verified by experiments, and the results show that the motion accuracy of the test bench has been effectively improved.

Publisher

Trans Tech Publications, Ltd.

Reference9 articles.

1. Ping Yang, Tomohiko Takamura, Satoru Takahashi: Calibration for Multiple Motion Errors of X-Y Table on Micro-coordinate Measuring Machine(M-CMM) by Utilizing Multi-probe Scanning Method, ISUPEN2011, Tokyo, Japan(2011).

2. Kuang Cuifang, Feng Qibo, Zhang Bin: Study of the Method for Measuring Four-Degree-of-Freedom Geometric Errors of a Linear Stage, Chinese Journal of Lasers Vol. 32 (2005), pp.1266-1270.

3. Cao Rui, Zhang Bin, Feng Qibo: A Method for Roll-Angle Measurement in Multi-Degree-of-Freedom Measuring System, Acta Optica Sinica Vol. 28 (2008), pp.2344-2348.

4. Zhang Zhijing, Jin Xin, Zhou Min: Precise and Microminiature Manufacturing Theory, Technology and Its Appliance, Chinese Journal of Mechanical Engineering Vol. 43 (2007), p.49~61.

5. Su Heng, Hong Maisheng, Wei Yuanlei, et al: On-line Measurement of Machine Tools Straight-going Parts Motion Error, Chinese Journal of Mechanical Engineering Vol. 39 (2003), p.8~12.

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