Characteristics of Stress Distribution of Micro-Cantilever of Polycrystalline Copper at the Pull-in Voltage-Reference-Cited by-同舟云学术

Characteristics of Stress Distribution of Micro-Cantilever of Polycrystalline Copper at the Pull-in Voltage

Published:2013-02 Issue: Volume:300-301 Page:1309-1312
ISSN:1662-7482
Container-title:Applied Mechanics and Materials
language:
Short-container-title:AMM

Author:

Su Ji Long¹,Zhang Yan Jiao¹,Lian Xing Feng¹

Affiliation:

1. Fujian Agriculture and Forestry University

Abstract

The Ansys simulate software is utilized to analyze pull-in voltages and stresses of the fixed end of micro- cantilever beam with different thicknesses respectively. Based on the analysis of the electrostatic force at the pull-in voltage, the stress of fixed end of micro-beam and the maximum deflection are obtained. The relationship between the stress of fixed end and thickness is established. The results show that the mutation thickness of the stress and the pull-in voltage are at and respectively , it is consistent with the intrinsic size of the polycrystalline copper micro-beam.

Publisher

Trans Tech Publications, Ltd.

Link

https://www.scientific.net/AMM.300-301.1309.pdf

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