Stiffness Detection of Silicon Arm Based on Micro-Loading Method-Reference-Cited by-同舟云学术

Stiffness Detection of Silicon Arm Based on Micro-Loading Method

Published:2014-10 Issue: Volume:670-671 Page:1290-1295
ISSN:1662-7482
Container-title:Applied Mechanics and Materials
language:
Short-container-title:AMM

Author:

Quan Xu Song¹,Jin Xin¹,Zhang Zhi Jing¹,Yu Yang¹,Ma Liang¹

Affiliation:

1. Beijing Institute of Technology

Abstract

A micro-loading stiffness detection method for micro-miniature components with brittle and complicated structure has been proposed to achieve stiffness detection of silicon arm. This paper adopts the methord of combing finite element analysis and micro-loading experiment together. Finally, the paper analyzed the deviation of silicon arm’s stiffness values obtained by simulation and experiment, and comparatively analyzed the variation tendency of silicon arm’s stiffness value among different claws. Result shows: the silicon arm’s stiffness value and the stiffness variation tendency obtained by experiment agrees well with it which is obtained by simulation. It proves the stiffness detection method is reliable and rational to achieve the stiffness detection of silicon arm.

Publisher

Trans Tech Publications, Ltd.

Link

https://www.scientific.net/AMM.670-671.1290.pdf

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