Non-Destructive Measurement of Doublet Objective Lens Structure Parameters Based on ZEMAX

Abstract

A method for structure parameters of doublet objective lens with non-destructive measurement is proposed based on the ZEMAX software. The focal length, back focal length, central thickness and the radius of curvature of the first surface and last surface are measured by a spherical interferometer and other instruments. Using the inversion of the evaluation function and optimizing of the ZEMAX, the series of refractive index of the materials and the cemented surface of the doublet objective lens are derived. Then the optimal combination of the glass materials is selected by the aberration tolerances of the doublet objective lens. The examples show that the result is satisfactory.