The Optical Properties and the Structure of CuInS2 Thin Films Deposited by Oblique Angle Deposition Technique

Abstract

The oblique angle deposition (OAD) technique was used to deposit copper indium disulfide (CuInS2) films onto glass substrates by a vacuum thermal evaporation method. The powder source used in this work was obtained from the crushed CuInS2 polycrystalline ingot grown by Vertical Bridgeman method. In order to study the influences of depositing angle on the optical property and the structure of the CuInS2 films, the depositing angle θ was varied from 10° to 70° with a 30° gradient. These films were characterized by SEM, XRD and UV-Vis spectrophotometer. The results showed that the optical property and the structure of the films were closely related to the depositing angle θ. When the depositing angle θ increased, the band gap increased and the intensity of (112) characteristic peak of the CuInS2 films decreased.