Finite Element Simulation of a Novel Nano 3D Semiconductor Detector Fabricated by Anodizing the Aluminium

Abstract

The unique geometry of micro 3D semiconductor detectors, presents several advantages over conventional planar silicon detectors. But, manufacturing these kind of detectors requires high technology. The novel idea to achieve a high performance and low cost semiconductor detector is using the nanopattern of anodized aluminium as a mask to create nano3D detectors. The simulation results show that this novel nano3D radiation hard semiconductor detector with collection time less than 10 ps and full depletion voltage less than one volt can become increasingly important for possible future upgrades of 3D detectors of the Large Hadron Collider (LHC) at CERN and also medical imaging applications.