Wettability Study Using O<sub>2 </sub>and Ar RIE Gas Treatment on Aluminium Surface-Reference-Cited by-同舟云学术

Wettability Study Using O₂and Ar RIE Gas Treatment on Aluminium Surface

Published:2014-02 Issue: Volume:896 Page:233-236
ISSN:1662-8985
Container-title:Advanced Materials Research
language:
Short-container-title:AMR

Author:

Retnasamy Vithyacharan¹,Sauli Zaliman¹,Palianysamy Moganraj¹,Taniselass Steven¹,Ehkan Phaklen²,Fuad Fairul Afzal Ahmad²

Affiliation:

1. University Malaysia Perlis

2. Universiti Malaysia Perlis (UniMAP)

Abstract

Wettability is one of the most important aspects in microfluid technology. The effect of surface roughness on the wettability by a liquid has been studied experimentally using Design of Experiment(DOE). Sixteen samples were etched using Reactive Ion Etching (RIE) technique with different combination of parameters. RIE parameters concerned in this experiment are ratio of Oxygen, Argon, ICP power and BIAS power. Reactive Ion Etching influences surface morphology which is correlated with the contact angle produced. This preliminary study is to gain information on the how does RIE affects the aluminum bondpad in terms of surface roughness and contact angle.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

Link

https://www.scientific.net/AMR.896.233.pdf

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