Affiliation:
1. Holst Centre/TNO
2. DuPont Teijin Films U.K. Limited
Abstract
Flexible electronics technology can potentially result in many compelling applications
not satisfied by the rigid Si-based conventional electronics. Commercially available foils such as
polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) have emerged as the most
suitable polymer materials for wide range of flexible electronics applications. Despite the enormous
progress which has been recently done on the optimization of physical and mechanical properties of
PET and PEN foils, their dimensional stability at the micro-scale is still an issue during patterning
of wiring by means of lithography. Consequently, the measurement of in-plane micro-deformation
of foil is of great importance for understanding and predicting its thermal, hydroscopic and
mechanical behaviour during processing.
Publisher
Trans Tech Publications, Ltd.
Cited by
35 articles.
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