Influence of MgO Molar Concentration to the Properties of Multilayer ZnO/MgO Films Using Sol-Gel Method
-
Published:2012-10
Issue:
Volume:576
Page:309-313
-
ISSN:1662-8985
-
Container-title:Advanced Materials Research
-
language:
-
Short-container-title:AMR
Author:
Habibah Zulkefle1, Rahman N.S.1, Wahid M.H.2, Ismail L.N.1, Bakar Raudah Abu3, Mamat M.H.1, Rusop Mahmood Mohamad1
Affiliation:
1. Universiti Teknologi MARA (UiTM) 2. Universiti Teknologi MARA Malaysia 3. University Teknologi MARA (UiTM)
Abstract
Multilayer ZnO/MgO was successfully deposited using sol-gel spin coating method at different MgO molar concentration. The electrical and dielectric properties of deposited multilayer films were investigated using two point probes I-V measurement and impedance spectroscopy respectively. The resistivity was calculated based on I-V curve obtained and the results show that there is increment in resistivity values from 1.04 x 105Ω.cm to 7.45 x 105Ω.cm as the MgO concentration varied from 0.2M to 1.0M. The growth of multilayer films was measured in term of their thickness using surface profiler. Moreover from the observation, the value of dielectric constant, k is decrease when the MgO concentrations increase due to non-uniform and porous structure in the films. This is proven by their surface morphology observed by field emission scanning electron microscopy, FESEM. There is also interesting view obtained in this work where the surface morphology of multilayer film with 0.2M and 0.4M MgO concentration produced nano-flower and nano-rod like structure respectively.
Publisher
Trans Tech Publications, Ltd.
Subject
General Engineering
Reference15 articles.
1. Ajay Kaushal, Davinder Kaur, Pulsed laser deposition of transparent ZnO/MgO multilayers, Journal of Alloys and Compounds, 509 (2011) 200-205. 2. E. Miranda, E. O' Connor, G. Hughes, P. Casey, K. Cherkaoui, S. Monaghan, R. Long, D. O'Conell, P. Hurley, Soft breakdown in MgO dielectric layers, Reliability Physics Symposium, (2009) 688-691. 3. X. Fu, Z. Song, G. Wu, J. Huang, X. Duo, C. Lin, Preparation and characterization of MgO thin films by a novel sol-gel method, Journal of Sol-Gel Science and Technology, 16 (1999) 277-281. 4. L. Manchanda, M. D. Morris, M. L. Green, R. B. Van Dover, F. Klemens, T. W. Sorsch, P. J. Silverman, G. Wilk, B. Busch, S. Aravamudhan, Multi-component high-k gate dielectrics for the silicon industry, Microelectronic Engineering, 59 (2001). 5. E. G. Fu, D. M. Zhuang, G. Zhang, Z. Ming, W. F. Yang, J. J. Liu, Effect of thickness on the structural electrical and optical properties of ZnO films, Microelectronics, 35 (2004).
|
|