Research Progress on Electrostatic Discharge Failure Models in Semiconductor Materials

Abstract

Electrostatic discharge (ESD) is a single, fast, high current transfer of electrostatic charge between two objects at different electrostatic potentials, and it is one of the most important failure mechanisms in integrated circuits due to their complex operation condition. The modes, mechanism, and models of the ESD failure were discussed. Firstly failure modes of ESD were classified and the failure mechanisms were described. Then three failure models including Wunsch and Bell model, Speakman model and Tasca model were summarized. The differences of the assumption and application area of these models were discussed in detail later. At last, suggestions for future studying ESD physics of failure model were proposed.