Preparation of Lead Zirconate Titanate Thin Film Using Magnetron Sputtering-Reference-Cited by-同舟云学术

Preparation of Lead Zirconate Titanate Thin Film Using Magnetron Sputtering

Published:2012-06 Issue: Volume:538-541 Page:162-165
ISSN:1662-8985
Container-title:Advanced Materials Research
language:
Short-container-title:AMR

Author:

Yu Li Yang¹,Wang Yang²,Yao Guo Hua³

Affiliation:

1. Hangzhou Dianzi University

2. College of Science Zhejiang Sci-Tech University

3. Zhejiang Jiakang Electronics Co. Ltd

Abstract

PZT(lead zirconate titanate) piezoelectric thin films were deposited on the glass substrates by RF (radio frequency) magnetron sputtering reaction method. The XRD(X-ray diffraction) analysis is used to characterize the structure of thin film, the pattern of EDS(energy dispersive spectrometer) shows the composition of thin film, and SEM(Scanning Electron Microscopy) is used to study the morphologies of thin films. The influence of different sputter gas content on the crystalline quality and the surface morphology are also investigated. The results demonstrate that volatile of lead oxide is closed to the ratio with the oxide content. The roughness of the thin film is influenced by the crystalline quality.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

Link

https://www.scientific.net/AMR.538-541.162.pdf

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