Affiliation:
1. Chinese Academy of Sciences
Abstract
Scanning tunneling microscope (STM) has several advantages, such as high resolution, and is wildly used. Piezoelectric scanner brings the horizontal resolution of STM up to 0.1 nm, and is it derived by piezoelectric ceramic. Piezoelectric scanner has piezoelectric ceramic’s character. So, piezoelectric scanner output must be calibrated at regular intervals. Graphite atom arrange in a special manner. In the same layer, the distance between adjacent atoms is the same, 0.25nm. This feature can be used to measure length and calibrate small scale scanning. For the 512 × 512 resolution image, the maximum scan range that can distinguish atoms is 30nm2. More large area of atomic image needs to use image stitching technology. By image stitching, small scale scanning, less than 1μm can be calibrated.
Publisher
Trans Tech Publications, Ltd.
Reference6 articles.
1. G. Binnig and H. Rohrer: Helvetica Physica Acta, vol. 55(1982), p.72.
2. H. Kawakatsu and T. Higuchi: Journal of Vacuum Science & Technology, vol. 8(1990), p.319.
3. H. Kawakatsu and T. Higuch: Journal of Vacuum Science & Technology, vol. 14(1996), p.11.
4. E. C. Teague: Journal of Vacuum Science & Technology, vol. 7(1989), p.1898.
5. X.F. Lin, H.J. Zhang, D.X. Zhang: Chinese Journal of Scientific Instrument, vol. 26(2005), p.991.