High-Temperature Acoustical and Electrical Properties of LGS, LGT and CTGS Resonators

Abstract

Acoustic characteristics and electrical conductivity of CTGS, LGT and LGS bulk acoustic wave resonators operated at the fundamental mode in the temperature range of 20-1470°C are studied. It is shown that LGS and CTGS resonators can be excited piezoelectrically up to 1470 and 1270°C, respectively, which is close to their melting temperatures. The electrical conductivity of CTGS is found to be by at least two and three orders of magnitude lower than that of LGS and LGT, respectively, over the temperature range 400-1000°C. Measurements of temperature dependent electromechanical losses show, that they are at least by two orders of magnitude lower in CTGS comparing to that in LGS within the measured temperature range.