Electrical Characterization of As-Processed Semiconductor Surfaces - Invited Paper
-
Published:2016-09
Issue:
Volume:255
Page:299-303
-
ISSN:1662-9779
-
Container-title:Solid State Phenomena
-
language:
-
Short-container-title:SSP
Author:
Ruzyllo Jerzy1,
Drummond Patrick J.2
Affiliation:
1. Pennsylvania State University
2. Penn State University
Abstract
The paper is concerned with electrical characterization of as-processed semiconductor surfaces and near-surface regions for the purpose of process development and monitoring. The methods of electrical characterization based on Surface Photovoltage (SPV) and Photoconductance Decay (PCD) effects are discussed as being particularly conducive with the needs of as-processed semiconductor surface characterization and experimental results demonstrating merits of the proposed methodology are presented.
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics