Determination of Elastic Modulus and relative Permittivity from Analysis of Auger Electron and Characteristic Loss Spectra in Carbon Layer Systems

Abstract

The analysis of Auger electron and electron energy-loss spectra was developed to determine an elastic modulus and a relative permittivity of the diamond and tetrahedral amorphous carbon layers (both on the substrate of NiTi alloy), the graphite and graphite-like carbon layers in a carbon/oxidization/ TiNi systems. The description of line-shape carbon Auger spectrum is based on the convolution of two-conduction electron and one-core electron spectral densities. It was concluded that the comparisons of the experimental and theoretical Auger spectra were determined the quantitative assessment of the electron-electron repulsion, which allow us to calculate the relative permittivity of the layer. The analysis of electron plasmon losses was applied to determine the values of plasma energies of the layers. Such parameter values were as then applied to calculate the values of nanoscale properties. The results demonstrated that the property values of the carbon layers were in good agreement with that reported in literature.