Using Superhydrophobic SU-8 Film as the Dielectric for Electrowetting-on-Dielectric

Abstract

In this paper, we study the electrowetting effect of superhydrophobic SU-8 film as the dielectric for Electrowetting-on-Dielectric (EWOD). The change of apparent contact angle (APCA) on superhydrophobic surface in electrowetting systems was measured and analyzed using a modified Lippmann-Yong equation. The variation of APCA between droplet and device surface under various DC voltage and AC voltage of different frequencies was fully experimented. The experimental results were in good agreement with the theoretical predictions. This study shows the potential of using superhydrophobic SU-8 film as the dielectric layer in high-performance EWOD devices.