Design and Fabrication of PDMS/PMMA-Based Rotary Micropump

Abstract

A novel micropump is proposed comprising a PMMA-based rotor, a circular PDMS micro-chamber, and a semi-circular PDMS microchannel connecting the inlet and outlet reservoirs as the rotor spins, a plug of sample fluid is trapped within the microchannel between neighboring blades of the rotor and is driven through the channel toward the outlet. Meanwhile, the rotors periodically compress and release the inlet and outlet regions of the microchannel. Thus, as the rotor turns, one plug of sample fluid is drawn into the microchannel as another is ejected into the outlet reservoir. In other words, a peristaltic pumping effect is achieved. It is shown that the flow rate in the proposed device can be controlled simply by adjusting the rotational velocity of the rotor. A maximum flow rate of 1.22 ml/min is obtained given de-ionized water as the working fluid and a rotational velocity of 232 rpm. Moreover, given the same rotational velocity, flow rates of 0.724 ml/min and 0.336 ml/min are obtained for salad oil and engine oil, respectively.