Affiliation:
1. Ufa State Aviation Technical University
Abstract
The article presents the results of the technology development for the vacuum ion-plasma coating deposition with the additional ionic bombardment. As a method to realize the additional ionic bombardment, use of the hollow cathode effect or non-self-maintained high-current discharge generated by the plasma source with an incandescent cathode (PSIC) is suggested. The technology of synthesis of protective coatings with the submicrocrystalline structure was developed.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
8 articles.
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