Affiliation:
1. GRIKIN Advanced Materials Co.,Ltd
Abstract
High-purity precious metal and its alloy targets make a very important role in semiconductor manufacturing. In this paper, the preparation methods of high performance sputtering targets (including silver, platinum and its alloy, ruthenium materials) for advanced semiconductor manufacturing were introduced. The relationships between deposited film behaviors and sputtering target properties in some applications were also discussed. In order to acquire high quality thin film, the properties of sputtering target such as density, alloy composition homogeneity, grain size and uniformity et al. have to be well controlled by proper fabrication techniques.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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