Nanostructure Growth Supported by In Situ RHEED Evaluation
-
Published:2017-02
Issue:
Volume:885
Page:234-238
-
ISSN:1662-9752
-
Container-title:Materials Science Forum
-
language:
-
Short-container-title:MSF
Author:
Kucsera Péter1,
Sándor Tamás1,
Tényi Gusztáv Varga2,
Csutorás Márton2,
Bátori Gergely2,
Kupás-Deák Béla1,
Réti István3,
Ürmös Antal1,
Nemcsics Ákos1
Affiliation:
1. Óbuda University
2. ESAB Hungary Ltd.
3. Research Institute for Technical Physics and Materials Science
Abstract
The in-situ monitoring of the MBE grown nanostructures can be carried out using the RHEED method. During the droplet epitaxal growth, the observation of the nanostructure formation is very important to understand the growth kinetics. In the present work, a novel in-situ RHEED evaluation and further MBE related developments are introduced, with which the quality of the nanostructure preparation can be improved.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Regression Study on Logarithms of Geometrical and Technological Parameters of Zero-dimensional Nanostructures;2021 IEEE 4th International Conference and Workshop Óbuda on Electrical and Power Engineering (CANDO-EPE);2021-11-17